MEMS Courses

Courses in Microsystems

To add a micro-systems related course here, send an email with the details to msiatumd@gmail.com.

Undergraduate		Graduate
♦ ENME 476 MEMS 1 next offered: Fall 2015 prerequisite: none Course description: Microelectromechanical systems (MEMS) include micro-sensors, micro-actuators, opto-mechanical assemblies, and labs-on-a-chip. This introductory class covers the fundamentals of microfabricating these devices. This requires knowledge of a broad range of disciplines, from chemistry to solid state device physics, topics which are also covered in this course. The class includes a mandatory laboratory component in which students go to the FabLab to make a thermally actuated micro-cantilever using surface and bulk micromachining. ♦ ENME 481 Lab-on-a-Chip next offered: Spring 2015 prerequisite: none Course description: This course presents fundamentals and applications of microfluidic technologies for lab-on-a-chip applications. It provides a broad view of the field of microfluidics, knowledge of relevant fabrication methods and analysis techniques, and an understanding of the coupled multi-domain phenomena that dominate the physics in these systems. Microfluidic fabrication techniques, transport processes, flow control methods, molecular separations, and techniques for analyte detection in microchannels will be emphasized. The course culminates with an individual project in which each student is expected to demonstrate mastery of basic concepts in microfluidic modeling, design, and fabrication of a specific lab-on-a-chip technology selected in consultation with the instructor. ♦ ENEE 416 Integrated Circuit Fabrication Lab next offered: Fall 2015 prerequisite: ENEE303 Course description: Characterization of wafers and fabrication steps. Oxide growth, lithography, dopant diffusion, and metal deposition and patterning will be discussed in the lectures and carried out in the lab in fabricating NMOS transistor circuits. The transistor characteristics will be measured and related to the fabrication parameters. For further information: course information assignments ♦ ENMA 462 Smart Materials next offered: ??? prerequisite: by permission of the Department of Materials Science and Engineering Course description: The course will provide a fundamental understanding of ferroic materials, ferromagnets, ferroelectric materials, shape memory alloys and multiferroic materials that are simultaneously ferromagnetic and ferroelectric etc. The ferroic properties will be discussed on an atomic, nano-and micro- scales so that actual and potential applications on those scales become clear. Examples of those applications will be presented. For further information: view PDF		♦ ENME 808K MEMS 1 next offered: Fall 2015 prerequisite: none Course description: Microelectromechanical systems (MEMS) include micro-sensors, micro-actuators, opto-mechanical assemblies, and labs-on-a-chip. This introductory class covers the fundamentals of microfabricating these devices. This requires knowledge of a broad range of disciplines, from chemistry to solid state device physics, topics which are covered in this course. The class includes a mandatory laboratory component. The graduate version of the course is more demanding than the undergraduate version, ENME 476 ♦ ENEE 605 Fabrication and Testing of Micro-Electro-Mechanical Systems next offered: Fall 2016 prerequisite: none Course description: The goal of this course is to explore the world of Micro-Electro-Mechanical Systems (MEMS) by understanding its design and fabrication aspects. Students will learn about fundamentals of MEMS sensors and actuators through lectures, literature, and homework assignments. Classic MEMS examples like microaccelerometers for crash detection in vehicles, pressure sensors for implantable medical devices, arrays of miniature mirrors for projection displays, and systems for chemical detection and assay will be reviewed. In a group project, students will apply and expand their knowledge in designing a novel MEMS device for application in brain health. This field is only recently being discovered for engineering solutions – examples of existing devices include deep brain stimulation probes for Parkinson’s disease, point-of-care lithium sensors for Bipolar disorder, or transcranial magnetic stimulators for depression. At the end of the course, the students will have gained an understanding of the benefits of MEMS devices, of common design and fabrication methods, and of opportunities in applying technological solutions to fields outside their main area of expertise. ♦ ENEE 719F Fabrication and Testing of Micro-Electro-Mechanical Systems next offered: TBD prerequisite: ENEE 605 or equivalent Course description: The goals of this course are to go beyond the “design stage” in micro-electro-mechanical systems (MEMS) to provide students with a strong background in fabrication, testing, and characterization of MEMS. The main focus is to understand the fundamental challenges and limitations involved in developing and testing MEMS devices and systems. Various MEMS devices will be developed based on preliminary designs from the earlier course, ENEE 605 Design and Fabrication of MEMS. This is a “hands-on” course in which students are likely to spend an average of ten hours per week in the cleanroom and testing labs. Students’ progress will be monitored through lab reports, monthly presentations, and reports. For further information: course site ♦ ENME 808E Lab-on-a-Chip next offered: Spring 2015 prerequisite: none Course description: This course presents fundamentals and applications of microfluidic technologies for lab-on-a-chip applications. It provides a broad view of the field of microfluidics, knowledge of relevant fabrication methods and analysis techniques, and an understanding of the coupled multi-domain phenomena that dominate the physics in these systems. Microfluidic fabrication techniques, transport processes, flow control methods, molecular separations, and techniques for analyte detection in microchannels will be emphasized. The course culminates with an individual project in which each student is expected to demonstrate mastery of basic concepts in microfluidic modeling, design, and fabrication of a specific lab-on-a-chip technology selected in consultation with the instructor. ♦ ENME 808O Micro-Robotics next offered: Spring 2016 prerequisite: ENME351 or equivalent. It is preferred, but not required that the student have some background in MEMS, robotics, or nanotech. Course description: This course will cover design, modeling, fabrication, and analysis of robots operating on the “micro” and “nano” scale. Micro/nano robots are defined in a variety of different ways but in general a microrobot will have features on the micron scale or make use of micro-scale physics for manipulation or mobility. Topics covered will include the physics of scaling, fabrication, actuation and sensing, and case studies of micro/nano robots.

Undergraduate

Graduate

♦ ENME 476 MEMS 1

next offered: Fall 2015
prerequisite: none
Course description: Microelectromechanical systems (MEMS) include micro-sensors, micro-actuators, opto-mechanical assemblies, and labs-on-a-chip. This introductory class covers the fundamentals of microfabricating these devices. This requires knowledge of a broad range of disciplines, from chemistry to solid state device physics, topics which are also covered in this course. The class includes a mandatory laboratory component in which students go to the FabLab to make a thermally actuated micro-cantilever using surface and bulk micromachining.

♦ ENME 481 Lab-on-a-Chip

next offered: Spring 2015
prerequisite: none
Course description: This course presents fundamentals and applications of microfluidic technologies for lab-on-a-chip applications. It provides a broad view of the field of microfluidics, knowledge of relevant fabrication methods and analysis techniques, and an understanding of the coupled multi-domain phenomena that dominate the physics in these systems. Microfluidic fabrication techniques, transport processes, flow control methods, molecular separations, and techniques for analyte detection in microchannels will be emphasized. The course culminates with an individual project in which each student is expected to demonstrate mastery of basic concepts in microfluidic modeling, design, and fabrication of a specific lab-on-a-chip technology selected in consultation with the instructor.

♦ ENEE 416 Integrated Circuit Fabrication Lab

next offered: Fall 2015
prerequisite: ENEE303
Course description: Characterization of wafers and fabrication steps. Oxide growth, lithography, dopant diffusion, and metal deposition and patterning will be discussed in the lectures and carried out in the lab in fabricating NMOS transistor circuits. The transistor characteristics will be measured and related to the fabrication parameters.
For further information:
course information
assignments

♦ ENMA 462 Smart Materials

next offered: ???
prerequisite: by permission of the Department of Materials Science and Engineering
Course description: The course will provide a fundamental understanding of ferroic materials, ferromagnets, ferroelectric materials, shape memory alloys and multiferroic materials that are simultaneously ferromagnetic and ferroelectric etc. The ferroic properties will be discussed on an atomic, nano-and micro- scales so that actual and potential applications on those scales become clear. Examples of those applications will be presented.
For further information:
view PDF

♦ ENME 808K MEMS 1

next offered: Fall 2015
prerequisite: none
Course description: Microelectromechanical systems (MEMS) include micro-sensors, micro-actuators, opto-mechanical assemblies, and labs-on-a-chip. This introductory class covers the fundamentals of microfabricating these devices. This requires knowledge of a broad range of disciplines, from chemistry to solid state device physics, topics which are covered in this course. The class includes a mandatory laboratory component. The graduate version of the course is more demanding than the undergraduate version, ENME 476

♦ ENEE 605 Fabrication and Testing of Micro-Electro-Mechanical Systems

next offered: Fall 2016
prerequisite: none
Course description: The goal of this course is to explore the world of Micro-Electro-Mechanical Systems (MEMS) by understanding its design and fabrication aspects. Students will learn about fundamentals of MEMS sensors and actuators through lectures, literature, and homework assignments. Classic MEMS examples like microaccelerometers for crash detection in vehicles, pressure sensors for implantable medical devices, arrays of miniature mirrors for projection displays, and systems for chemical detection and assay will be reviewed. In a group project, students will apply and expand their knowledge in designing a novel MEMS device for application in brain health. This field is only recently being discovered for engineering solutions – examples of existing devices include deep brain stimulation probes for Parkinson’s disease, point-of-care lithium sensors for Bipolar disorder, or transcranial magnetic stimulators for depression. At the end of the course, the students will have gained an understanding of the benefits of MEMS devices, of common design and fabrication methods, and of opportunities in applying technological solutions to fields outside their main area of expertise.

♦ ENEE 719F Fabrication and Testing of Micro-Electro-Mechanical Systems

next offered: TBD
prerequisite: ENEE 605 or equivalent
Course description: The goals of this course are to go beyond the “design stage” in micro-electro-mechanical systems (MEMS) to provide students with a strong background in fabrication, testing, and characterization of MEMS. The main focus is to understand the fundamental challenges and limitations involved in developing and testing MEMS devices and systems. Various MEMS devices will be developed based on preliminary designs from the earlier course, ENEE 605 Design and Fabrication of MEMS. This is a “hands-on” course in which students are likely to spend an average of ten hours per week in the cleanroom and testing labs. Students’ progress will be monitored through lab reports, monthly presentations, and reports.
For further information:
course site

♦ ENME 808E Lab-on-a-Chip

♦ ENME 808O Micro-Robotics

next offered: Spring 2016
prerequisite: ENME351 or equivalent. It is preferred, but not required that the student have some background in MEMS, robotics, or nanotech.
Course description: This course will cover design, modeling, fabrication, and analysis of robots operating on the “micro” and “nano” scale. Micro/nano robots are defined in a variety of different ways but in general a microrobot will have features on the micron scale or make use of micro-scale physics for manipulation or mobility. Topics covered will include the physics of scaling, fabrication, actuation and sensing, and case studies of micro/nano robots.

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